Zobacz książki o podobnej tematyce

Więcej informacji o Rapid Thermal Processing

• Dane szczegółowe
• Opis
• Ulubione w innej kategorii

Za ten zakup dostaniesz 225 punkty

Opis

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Szczegóły książki

Kategoria Książki po angielsku Technology, engineering, agriculture Mechanical engineering & materials Materials science

• Pełny tytuł: Rapid Thermal Processing
• Podtytuł: Science and Technology
• Autor: Richard B. Fair
• Język: Angielski
• Oprawa: Twarda
• Liczba stron: 430
• EAN: 9780122476907
• ISBN: 0122476905
• ID: 04493400
• Wydawca: Academic Press
• Waga: 770 g
• Wymiary: 229 × 152 × 25 mm
• Data wydania: 07. June 1993

Ulubione w innej kategorii

---

---

---