Code: 11571490
An Introduction to Microelectromechanical Systems Engineering
by Nadim Maluf
Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates ... more
- Language:
English - Binding: Hardback
- Number of pages: 292
Publisher: ARTECH HOUSE INC, 1999
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87.94 €
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Book synopsis
Here's the first non-technical introduction to the exciting field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications.
Book details
87.94 €
- Full title: An Introduction to Microelectromechanical Systems Engineering
- Author: Nadim Maluf
- Language: English
- Binding: Hardback
- Number of pages: 292
- EAN: 9780890065815
- ISBN: 0890065810
- ID: 11571490
- Publisher: ARTECH HOUSE INC
- Weight: 644 g
- Dimensions: 236 × 161 × 24 mm
- Date of publishing: November 1999
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