Code: 01550393
Cmos - Mems
by Henry Baltes, Oliver Brand, Gary K. Fedder
Mikrostrukturforschung, Elektronik und Nanotechnologie wachsen im Zuge der Miniaturisierung von Bauelementen zu einem großen interdisziplinären Forschungsgebiet zusammen. Die neue Reihe "Advanced Micro and Nano Systems" widmet sic ... more
- Language:
English - Binding: Hardback
- Number of pages: 608
Publisher: Wiley-VCH Verlag GmbH, 2005
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328.92 €
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Book synopsis
Mikrostrukturforschung, Elektronik und Nanotechnologie wachsen im Zuge der Miniaturisierung von Bauelementen zu einem großen interdisziplinären Forschungsgebiet zusammen. Die neue Reihe "Advanced Micro and Nano Systems" widmet sich Technologien, Bauelementen und Systemen aus der Mikro- und der Nanowelt mit Beiträgen renommierter Spitzenforscher. In diesem Band finden Sie ausführliche Angaben zu Sensoren und mikroelektromechanischen Systemen (MEMS) auf CMOS-Basis - von materialtechnischen Aspekten über designspezifische Informationen bis zu Gesichtpunkten der Montage und Verpackung.
Book details
Book category Books in English Technology, engineering, agriculture Technology: general issues Nanotechnology
328.92 €
- Full title: Cmos - Mems
- Author: Henry Baltes, Oliver Brand, Gary K. Fedder
- Language: English
- Binding: Hardback
- Number of pages: 608
- EAN: 9783527310807
- ISBN: 3527310800
- ID: 01550393
- Publisher: Wiley-VCH Verlag GmbH
- Weight: 1270 g
- Dimensions: 246 × 186 × 35 mm
- Date of publishing: 15. February 2005
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