Code: 04883820
EUV Lithography
by Vivek Bakshi
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical in ... more
- Language:
English - Binding: Hardback
- Number of pages: 702
Publisher: John Wiley & Sons Inc, 2009
- More about this
133.67 €
RRP: 136.37 €
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Book synopsis
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
Book details
Book category Books in English Technology, engineering, agriculture Electronics & communications engineering
133.67 €
- Full title: EUV Lithography
- Author: Vivek Bakshi
- Language: English
- Binding: Hardback
- Number of pages: 702
- EAN: 9780470471555
- ISBN: 0470471557
- ID: 04883820
- Publisher: John Wiley & Sons Inc
- Weight: 1582 g
- Dimensions: 259 × 191 × 45 mm
- Date of publishing: 16. January 2009
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