Glow Discharge Processes - Sputtering and Plasma Etching / Najlacnejšie knihy
Glow Discharge Processes - Sputtering and Plasma Etching

Code: 04887388

Glow Discharge Processes - Sputtering and Plasma Etching

by Brian Chapman

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to indust ... more

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Book synopsis

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Book details

Book category Books in English Mathematics & science Physics Electricity, electromagnetism & magnetism

254.84 €

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