Materials and Failures in MEMS and NEMS / Najlacnejšie knihy
Materials and Failures in MEMS and NEMS

Code: 03025946

Materials and Failures in MEMS and NEMS

by Baldev Raj

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. ... more

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Book synopsis

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.

Book details

Book category Books in English Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

255.46

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