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Book synopsis

The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).

Book details

Book category Books in English Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

• Full title: Materials and Processes for Submicron Technologies
• Author: J. M. Martinez-Duart, R. Madar, R. a. Levy
• Language: English
• Binding: Hardback
• Number of pages: 180
• EAN: 9780080436173
• ISBN: 008043617X
• ID: 04490729
• Publisher: Elsevier Science & Technology
• Weight: 570 g
• Dimensions: 279 × 210 mm
• Date of publishing: 03. November 1999

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