Code: 01202093
MEMS Materials and Processes Handbook
by Reza Ghodssi
This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with ... more
- Language:
English - Binding: Hardback
- Number of pages: 1224
Publisher: SPRINGER PG, 2011
- More about this
315.80 €
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Book synopsis
This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with examples of common uses.
Book details
Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science
315.80 €
- Full title: MEMS Materials and Processes Handbook
- Author: Reza Ghodssi
- Language: English
- Binding: Hardback
- Number of pages: 1224
- EAN: 9780387473161
- ISBN: 0387473165
- ID: 01202093
- Publisher: SPRINGER PG
- Weight: 1843 g
- Dimensions: 240 × 159 × 73 mm
- Date of publishing: 29. June 2011
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