MEMS Materials and Processes Handbook / Najlacnejšie knihy
MEMS Materials and Processes Handbook

Code: 01202093

MEMS Materials and Processes Handbook

by Reza Ghodssi

This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with ... more

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Book synopsis

This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with examples of common uses.

Book details

Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science

271.38

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