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Book synopsis

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

Book details

Book category Books in English Reference, information & interdisciplinary subjects Research & information: general Information theory

• Full title: Microsystem Technology and Microrobotics
• Author: Sergej Fatikow, Ulrich Rembold
• Language: English
• Binding: Paperback
• Number of pages: 408
• EAN: 9783642082320
• ISBN: 3642082327
• ID: 01653266
• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Weight: 646 g
• Dimensions: 235 × 155 × 23 mm
• Date of publishing: 02. December 2010

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