You might also like

More about Microsystem Technology and Microrobotics

• Book details
• Synopsis
• Trending among others

You get 373 loyalty points

Book synopsis

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Book details

Book category Books in English Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

• Full title: Microsystem Technology and Microrobotics
• Author: Sergej Fatikow, Ulrich Rembold
• Language: English
• Binding: Hardback
• Number of pages: 408
• EAN: 9783540606581
• ISBN: 3540606580
• ID: 01566064
• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Weight: 1710 g
• Dimensions: 234 × 156 × 27 mm
• Date of publishing: 20. March 1997

Trending among others

---

---

---