Code: 07019821

Mikromechanik

Name: Mikromechanik
Brand: Springer, Berlin
SKU: 07019821
Price: 75.35 EUR
Availability: InStock
Author: Anton Heuberger
ISBN: 9783642466229

by Anton Heuberger

Language: German
Binding: Paperback
Number of pages: 501
Publisher: Springer, Berlin, 2012
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75.35 €

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Book synopsis

Mikromechanik behandelt die physikalischen Grundlagen dieser jungen, zukunftsträchtigen Disziplin, ihre Technologie, aufbauend auf der Siliziumtechnologie, und ihre Nutzung in den verschiedensten Anwendungen der Bereiche Sensorik, Aktuatorik und integrierte Optoelektronik. Das Buch ist unentbehrlich für jeden, der sich intensiv mit der Mikromechanik befassen will; für den Studierenden ebenso wie für den Ingenieur in der Praxis oder den interessierten Laien.