Code: 01393288
Novel Silicon Based Technologies
by R.A. Levy
Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of ... more
- Language:
English - Binding: Hardback
- Number of pages: 277
Publisher: Springer Netherlands, 1991
- More about this
97.97 €
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Book synopsis
Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structure
Book details
97.97 €
- Full title: Novel Silicon Based Technologies
- Author: R.A. Levy
- Language: English
- Binding: Hardback
- Number of pages: 277
- EAN: 9780792311126
- ID: 01393288
- Publisher: Springer Netherlands
- Weight: 588 g
- Dimensions: 235 × 155 × 22 mm
- Published: 1991
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