Code: 06360759
Optical Lithography
by Burn Jeng Lin
Helps readers gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with an understanding of system components, processing, and ... more
- Language:
English - Binding: Paperback
- Number of pages: 500
Publisher: SPIE Press, 2010
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102.03 €
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Book synopsis
Helps readers gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with an understanding of system components, processing, and optimization. This book is suitable for engineers, technology managers, and senior technicians.
Book details
Book category Books in English Technology, engineering, agriculture Other technologies & applied sciences Applied optics
102.03 €
- Full title: Optical Lithography
- Subtitle: Here is Why
- Author: Burn Jeng Lin
- Language: English
- Binding: Paperback
- Number of pages: 500
- EAN: 9780819475602
- ISBN: 9780819475602
- ID: 06360759
- Publisher: SPIE Press
- Weight: 1182 g
- Date of publishing: 15. April 2010
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