Code: 04527765
Plasma Etching
by Minoru Sugawara
The focus of this book is on the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the ... more
- Language:
English - Binding: Hardback
- Number of pages: 356
Publisher: Oxford University Press, 1998
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Book synopsis
The focus of this book is on the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
Book details
Book category Books in English Mathematics & science Physics Materials / States of matter
253.43 €
- Full title: Plasma Etching
- Subtitle: Fundamentals and Applications
- Author: Minoru Sugawara
- Language: English
- Binding: Hardback
- Number of pages: 356
- EAN: 9780198562870
- ISBN: 019856287X
- ID: 04527765
- Publisher: Oxford University Press
- Weight: 743 g
- Dimensions: 242 × 163 × 23 mm
- Date of publishing: 28. May 1998
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