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Book synopsis

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Book details

Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science

• Full title: Predictive Simulation of Semiconductor Processing
• Subtitle: Status and Challenges
• Author: Jarek Dabrowski, Eicke R. Weber
• Language: English
• Binding: Paperback
• Number of pages: 490
• EAN: 9783642058042
• ISBN: 3642058043
• ID: 01651135
• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Weight: 859 g
• Dimensions: 235 × 155 × 28 mm
• Date of publishing: 03. December 2010

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