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Book synopsis

Micro- and Nanostructures significantly influence the physical and chemical properties of surfaces. Therefore, such structures can be used to functionalize surfaces and adjust the surface properties to the specific requirements of a certain application. A remaining challenge is the integration of functional structures into micro devices to achieve e.g. patterning in 3D, 3D surface structures and sidewall patterning. This work is focused on the development of processes to achieve both, the accurate replication of micro and nanostructures as well as the integration of functional surface structures into micro devices.

Book details

Book category Books in English Technology, engineering, agriculture Technology: general issues Engineering: general

• Full title: Process development for nanostructuring and 3D micro/nanointegration
• Author: Senn Tobias
• Language: English
• Binding: Paperback
• Number of pages: 180
• EAN: 9783838150284
• ISBN: 3838150287
• ID: 09187233
• Publisher: Sudwestdeutscher Verlag Fur Hochschulschriften AG
• Weight: 272 g
• Dimensions: 229 × 152 × 10 mm
• Date of publishing: 05. January 2015

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