Code: 02179687
Reduced Thermal Processing for ULSI
by R.A. Levy
Proceedings of a NATO ASI held in Boca Raton, Florida, June 20-July 1, 1988
- Language:
English - Binding: Paperback
- Number of pages: 450
Publisher: Springer-Verlag New York Inc., 2011
- More about this
51.68 €
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Book synopsis
Proceedings of a NATO ASI held in Boca Raton, Florida, June 20-July 1, 1988
Book details
Book category Books in English Mathematics & science Physics Materials / States of matter
51.68 €
- Full title: Reduced Thermal Processing for ULSI
- Author: R.A. Levy
- Language: English
- Binding: Paperback
- Number of pages: 450
- EAN: 9781461278573
- ISBN: 1461278570
- ID: 02179687
- Publisher: Springer-Verlag New York Inc.
- Weight: 781 g
- Dimensions: 244 × 170 × 25 mm
- Date of publishing: 30. September 2011
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