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Book synopsis

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Book details

Book category Books in English Mathematics & science Physics Optical physics

• Full title: Spectroscopic Ellipsometry - Principles and Applications
• Author: Hiroyuki Fujiwara
• Language: English
• Binding: Hardback
• Number of pages: 392
• EAN: 9780470016084
• ISBN: 0470016086
• ID: 04878436
• Publisher: John Wiley & Sons Inc
• Weight: 762 g
• Dimensions: 235 × 157 × 26 mm
• Date of publishing: 26. January 2007

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