Code: 04878436

Spectroscopic Ellipsometry - Principles and Applications

Name: Spectroscopic Ellipsometry - Principles and Applications
Brand: John Wiley & Sons Inc
SKU: 04878436
Price: 202.66 EUR
Availability: InStock
Author: Hiroyuki Fujiwara
ISBN: 9780470016084

by Hiroyuki Fujiwara

Language: English
Binding: Hardback
Number of pages: 392
Publisher: John Wiley & Sons Inc, 2007
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Book synopsis

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.