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Book synopsis

This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this bookoffers a unique and informative blend of fundamental science, processing, and applications. Exercises and a liberal addition of application examples are provided, along with extensive references to the primary literature to guide readers in understanding microelectronic materials as well as design new materials and applications.

Book details

Book category Books in English Technology, engineering, agriculture Electronics & communications engineering

• Full title: Surfaces, Interfaces, and Thin Films for Microelectronics
• Author: Eugene A. Irene
• Language: English
• Binding: Hardback
• Number of pages: 536
• EAN: 9780470174470
• ISBN: 0470174471
• ID: 01388110
• Publisher: John Wiley & Sons Inc
• Weight: 872 g
• Dimensions: 241 × 160 × 31 mm
• Date of publishing: 11. March 2008

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