Code: 01388110

Surfaces, Interfaces, and Thin Films for Microelectronics

Name: Surfaces, Interfaces, and Thin Films for Microelectronics
Brand: John Wiley & Sons Inc
SKU: 01388110
Price: 192.07 EUR
Availability: InStock
Author: Eugene A. Irene
ISBN: 9780470174470

by Eugene A. Irene

Language: English
Binding: Hardback
Number of pages: 536
Publisher: John Wiley & Sons Inc, 2008
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Book synopsis

This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this bookoffers a unique and informative blend of fundamental science, processing, and applications. Exercises and a liberal addition of application examples are provided, along with extensive references to the primary literature to guide readers in understanding microelectronic materials as well as design new materials and applications.