Code: 01377509
Physics of Submicron Lithography
by Kamil A. Valiev
This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientifi ... more
- Language:
English - Binding: Hardback
- Number of pages: 493
Publisher: Springer Science+Business Media, 1992
- More about this
241.93 €
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Book synopsis
This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.
Book details
Book category Books in English Mathematics & science Physics Materials / States of matter
241.93 €
- Full title: Physics of Submicron Lithography
- Author: Kamil A. Valiev
- Language: English
- Binding: Hardback
- Number of pages: 493
- EAN: 9780306435782
- ISBN: 0306435780
- ID: 01377509
- Publisher: Springer Science+Business Media
- Weight: 2600 g
- Dimensions: 254 × 178 × 32 mm
- Date of publishing: 31. March 1992
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