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Book synopsis

The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Book details

Book category Books in English Technology, engineering, agriculture Mechanical engineering & materials Materials science

• Full title: Wafer Bonding
• Subtitle: Applications and Technology
• Author: Marin Alexe, Ulrich Gösele
• Language: English
• Binding: Paperback
• Number of pages: 504
• EAN: 9783642059155
• ISBN: 3642059155
• ID: 01651230
• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Weight: 795 g
• Dimensions: 235 × 155 × 29 mm
• Date of publishing: 01. July 2011

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