Code: 06734771
X-Ray Metrology in Semiconductor Manufacturing
by Brian K. Tanner
Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin ... more
- Language:
English - Binding: Hardback
- Number of pages: 296
Publisher: Taylor & Francis Inc, 2006
- More about this
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Book synopsis
Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.
Book details
Book category Books in English Technology, engineering, agriculture Technology: general issues Instruments & instrumentation engineering
291.69 €
- Full title: X-Ray Metrology in Semiconductor Manufacturing
- Author: Brian K. Tanner
- Language: English
- Binding: Hardback
- Number of pages: 296
- EAN: 9780849339288
- ISBN: 9780849339288
- ID: 06734771
- Publisher: Taylor & Francis Inc
- Weight: 586 g
- Dimensions: 245 × 162 × 21 mm
- Date of publishing: 24. January 2006
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