Code: 06708211
Nanoparticle Engineering for Chemical-Mechanical Planarization
by Jea-Gun Park
Explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP and noble ... more
- Language:
English - Binding: Hardback
- Number of pages: 224
Publisher: Taylor & Francis Inc, 2009
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Book synopsis
Explains the physicochemical properties of nanoparticles according to each step in the chemical mechanical planarization (CMP) process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP and noble metal CMP. This work also presents design techniques using polymeric additives to improve CMP performance.
Book details
Book category Books in English Technology, engineering, agriculture Industrial chemistry & manufacturing technologies Industrial chemistry
278.05 €
- Full title: Nanoparticle Engineering for Chemical-Mechanical Planarization
- Author: Jea-Gun Park
- Language: English
- Binding: Hardback
- Number of pages: 224
- EAN: 9781420059113
- ISBN: 9781420059113
- ID: 06708211
- Publisher: Taylor & Francis Inc
- Weight: 570 g
- Dimensions: 234 × 156 × 20 mm
- Date of publishing: 20. February 2009
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