Code: 01559109

MEMS: A Practical Guide of Design, Analysis, and Applications

Name: MEMS: A Practical Guide of Design, Analysis, and Applications
Brand: Springer, Berlin
SKU: 01559109
Price: 205.62 EUR
Availability: InStock
Author: Jan G. Korvink
ISBN: 9783540211174

by Jan G. Korvink, Oliver Paul

Language: English
Binding: Hardback
Number of pages: 965
Publisher: Springer, Berlin, 2006
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Book synopsis

While the first generation of MEMS books comprehensively cover fabrication techniques, a lack of industry standards has created a void of books providing cohesive guidance on the design and analysis of micro-electro-mechanical systems (MEMS) across their wide range of innovative and varied applications. This book is the first to fill the void with 18 chapters written by leading experts worldwide covering topics such as transducer operations, topology simulation, and modeling, free-space microsystems, interface circuitry, magnetic, mechanical, chemical, thermal, and fluid microsensors, biomedical microsystems, integrated micro-optics, microactuators, and micromachining. The chapters address issues of alternative designs, reliability, performance, production, packaging, and cost effectiveness in the context of appropriate applications including automotive, biomedical, consumer, building, and industrial products.