Kód: 04527765
The focus of this book is on the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the ... celý popis
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Anotácia knihy
The focus of this book is on the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
Parametre knihy
Zaradenie knihy Knihy po anglicky Mathematics & science Physics Materials / States of matter
254.01 €
Angličtina
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