Kód: 06423929
Advanced Ta-Based Diffusion Barriers for Cu Interconnects
Autor Rene Hubner
Copper has become the standard metallisation material for on-chip interconnects in high-performance microprocessors. This book intends to carry out microstructure and functional property investigations for advanced, high-performan ... celý popis
- Jazyk:
Angličtina - Väzba: Brožovaná
- Počet strán: 102
Nakladateľ: Nova Science Publishers Inc, 2009
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Viac informácií o knihe Advanced Ta-Based Diffusion Barriers for Cu Interconnects
Nákupom získate 122 bodov
Anotácia knihy
Copper has become the standard metallisation material for on-chip interconnects in high-performance microprocessors. This book intends to carry out microstructure and functional property investigations for advanced, high-performance Tabased diffusion barriers before and after annealing to compare their thermal stabilities.
Parametre knihy
Zaradenie knihy Knihy po anglicky Technology, engineering, agriculture Electronics & communications engineering Electronics engineering
50.42 €
- Celý názov: Advanced Ta-Based Diffusion Barriers for Cu Interconnects
- Autor: Rene Hubner
- Jazyk: Angličtina
- Väzba: Brožovaná
- Počet strán: 102
- EAN: 9781604564518
- ISBN: 9781604564518
- ID: 06423929
- Nakladateľ: Nova Science Publishers Inc
- Hmotnosť: 192 g
- Rozmery: 227 × 153 × 8 mm
- Dátum vydania: 17. March 2009
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