Kód: 01428994
Atomic Layer Deposition for Semiconductors
Autor Cheol Seong Hwang
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. ... celý popis
- Jazyk:
Angličtina - Väzba: Pevná
- Počet strán: 263
Nakladateľ: Springer-Verlag New York Inc., 2013
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Viac informácií o knihe Atomic Layer Deposition for Semiconductors
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Anotácia knihy
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.
Parametre knihy
Zaradenie knihy Knihy po anglicky Technology, engineering, agriculture Electronics & communications engineering Electronics engineering
172.95 €
- Celý názov: Atomic Layer Deposition for Semiconductors
- Autor: Cheol Seong Hwang
- Jazyk: Angličtina
- Väzba: Pevná
- Počet strán: 263
- EAN: 9781461480532
- ISBN: 1461480531
- ID: 01428994
- Nakladateľ: Springer-Verlag New York Inc.
- Hmotnosť: 5384 g
- Rozmery: 235 × 155 × 19 mm
- Dátum vydania: 19. October 2013
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