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Viac informácií o knihe CCD Image Sensors in Deep-Ultraviolet

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Anotácia knihy

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

Parametre knihy

Zaradenie knihy Knihy po anglicky Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

• Celý názov: CCD Image Sensors in Deep-Ultraviolet
• Podnázov: Degradation Behaviour and Damage Mechanisms
• Autor: F. L. A. Nathon
• Jazyk: Angličtina
• Väzba: Pevná
• Počet strán: 232
• EAN: 9783540226802
• ISBN: 354022680X
• ID: 01559670
• Nakladateľ: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Hmotnosť: 508 g
• Rozmery: 240 × 164 × 20 mm
• Dátum vydania: 01. March 2005

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