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Anotácia knihy

New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues

Parametre knihy

Zaradenie knihy Knihy po anglicky Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

• Celý názov: Handbook of Thin Film Deposition
• Autor: Krishna Seshan
• Jazyk: Angličtina
• Väzba: Pevná
• Počet strán: 408
• EAN: 9781437778731
• ISBN: 1437778739
• ID: 01215836
• Nakladateľ: Elsevier Books
• Hmotnosť: 740 g
• Rozmery: 156 × 230 × 27 mm
• Dátum vydania: 27. June 2012

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