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Viac informácií o knihe Modelling of Microfabrication Systems

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Anotácia knihy

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illustrated, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

Parametre knihy

Zaradenie knihy Knihy po anglicky Technology, engineering, agriculture Technology: general issues Nanotechnology

• Celý názov: Modelling of Microfabrication Systems
• Autor: R. Nassar, W. Dai
• Jazyk: Angličtina
• Väzba: Pevná
• Počet strán: 270
• EAN: 9783540002529
• ISBN: 3540002529
• ID: 01556029
• Nakladateľ: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
• Hmotnosť: 1270 g
• Rozmery: 235 × 155 × 20 mm
• Dátum vydania: 13. June 2003

Obľúbené z iného súdka

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