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Viac informácií o knihe Rapid Thermal Processing

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Anotácia knihy

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Parametre knihy

Zaradenie knihy Knihy po anglicky Technology, engineering, agriculture Mechanical engineering & materials Materials science

• Celý názov: Rapid Thermal Processing
• Podnázov: Science and Technology
• Autor: Richard B. Fair
• Jazyk: Angličtina
• Väzba: Pevná
• Počet strán: 430
• EAN: 9780122476907
• ISBN: 0122476905
• ID: 04493400
• Nakladateľ: Academic Press
• Hmotnosť: 770 g
• Rozmery: 229 × 152 × 25 mm
• Dátum vydania: 07. June 1993

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